Presents the latest methods for designing and fabricating
self-powered micro-generators and energy harvester
systems

Design and Fabrication of Self-Powered Micro-Harvesters
introduces the latest trends of self-powered generators and energy
harvester systems, including the design, analysis and fabrication
of micro power systems. Presented in four distinct parts, the
authors explore the design and fabrication of: vibration-induced
electromagnetic micro-generators; rotary electromagnetic
micro-generators; flexible piezo-micro-generator with various
widths; and PVDF electrospunpiezo-energy with interdigital
electrode.

Focusing on the latest developments of self-powered
microgenerators such as micro rotary with LTCC and filament winding
method, flexible substrate, and piezo fiber-typed microgenerator
with sound organization, the fabrication processes involved in MEMS
and nanotechnology are introduced chapter by chapter. In addition,
analytical solutions are developed for each generator to help the
reader to understand the fundamentals of physical phenomena. Fully
illustrated throughout and of a high technical specification, it is
written in an accessible style to provide an essential reference
for industry and academic researchers.

* Comprehensive treatment of the newer harvesting devices
including vibration-induced and rotary electromagnetic
microgenerators, polyvinylidene fluoride (PVDF)
nanoscale/microscale fiber, and piezo-micro-generators

* Presents innovative technologies including LTCC (low
temperature co-fire ceramic) processes, and PCB (printed circuit
board) processes

* Offers interdisciplinary interest in MEMS/NEMS technologies,
green energy applications, bio-related sensors, actuators and
generators

* Presented in a readable style describing the fundamentals,
applications and explanations of micro-harvesters, with full
illustration

C. T. Pan National Sun Yat-Sen University, Taiwan

Y. M. Hwang National Sun Yat-Sen University, Taiwan

Liwei Lin University of California, Berkeley, USA

Ying-Chung Chen National Sun Yat-Sen University, Taiwan

Design and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design, analysis and fabrication of micro power systems. Presented in four distinct parts, the authors explore the design and fabrication of: vibration-induced electromagnetic micro-generators; rotary electromagnetic micro-generators; flexible piezo-micro-generator with various widths; and PVDF electrospun piezo-energy with interdigital electrode. Analytical solutions are developed for each generator to help the reader understand the fundamentals of physical phenomena.
Fully illustrated throughout, the book is written in an accessible style to provide an essential reference for industry and academic researchers.

• Comprehensive treatment of the newer harvesting devices including
  • vibration-induced and rotary electromagnetic microgenerators
  • polyvinylidene fluoride (PVDF) nanoscale/microscale fiber
  • piezo-micro-generators
• Presents innovative technologies including LTCC (low temperature co-fire ceramic) processes, and PCB (printed circuit board) processes
• Uses an interdisciplinary approach crossing MEMS/NEMS technologies, green energy applications, bio-related sensors, actuators and generators

Presented in a readable style describing the fundamentals, applications and explanations of micro-harvesters, with full illustrations

This book is ideal for graduate students in electrical and mechanical engineering, as well as researchers interested in electricity generation and energy harvesting, MEMS processes and design, advanced material analysis, and vibration analysis. The book can also be used by industry professionals working in energy services and utilities.

Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systems

Design and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design, analysis and fabrication of micro power systems. Presented in four distinct parts, the authors explore the design and fabrication of: vibration-induced electromagnetic micro-generators; rotary electromagnetic micro-generators; flexible piezo-micro-generator with various widths; and PVDF electrospunpiezo-energy with interdigital electrode.

Focusing on the latest developments of self-powered microgenerators such as micro rotary with LTCC and filament winding method, flexible substrate, and piezo fiber-typed microgenerator with sound organization, the fabrication processes involved in MEMS and nanotechnology are introduced chapter by chapter. In addition, analytical solutions are developed for each generator to help the reader to understand the fundamentals of physical phenomena. Fully illustrated throughout and of a high technical specification, it is written in an accessible style to provide an essential reference for industry and academic researchers.

• Comprehensive treatment of the newer harvesting devices including vibration-induced and rotary electromagnetic microgenerators, polyvinylidene fluoride (PVDF) nanoscale/microscale fiber, and piezo-micro-generators
• Presents innovative technologies including LTCC (low temperature co-fire ceramic) processes, and PCB (printed circuit board) processes
• Offers interdisciplinary interest in MEMS/NEMS technologies, green energy applications, bio-related sensors, actuators and generators
• Presented in a readable style describing the fundamentals, applications and explanations of micro-harvesters, with full illustration

Preface xiii

Acknowledgments xv

1 Introduction 1

1.1 Background 1

1.2 Energy Harvesters 2

1.2.1 Piezoelectric ZnO Energy Harvester 3

1.2.2 Vibrational Electromagnetic Generators 3

1.2.3 Rotary Electromagnetic Generators 4

1.2.4 NFES Piezoelectric PVDF Energy Harvester 4

1.3 Overview 5

2 Design and Fabrication of Flexible Piezoelectric Generators Based on ZnO Thin Films 7

2.1 Introduction 7

2.2 Characterization and Theoretical Analysis of Flexible ZnO-Based Piezoelectric Harvesters 10

2.2.1 Vibration Energy Conversion Model of Film-Based Flexible Piezoelectric Energy Harvester 10

2.2.2 Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12

2.2.3 Optimal Thickness of PET Substrate 15

2.2.4 Model Solution of Cantilever Plate Equation 15

2.2.5 Vibration-Induced Electric Potential and Electric Power 18

2.2.6 Static Analysis to Calculate the Optimal Thickness of the PET Substrate 19

2.2.7 Model Analysis and Harmonic Analysis 21

2.2.8 Results of Model Analysis and Harmonic Analysis 23

2.3 The Fabrication of Flexible Piezoelectric ZnO Harvesters on PET Substrates 27

2.3.1 Bonding Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27

2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29

2.3.3 Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29

2.3.4 Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering 31

2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant Conditions 34