Presents the latest methods for designing and fabricating
self-powered micro-generators and energy harvester
systems

Design and Fabrication of Self-Powered Micro-Harvesters
introduces the latest trends of self-powered generators and energy
harvester systems, including the design, analysis and fabrication
of micro power systems. Presented in four distinct parts, the
authors explore the design and fabrication of: vibration-induced
electromagnetic micro-generators; rotary electromagnetic
micro-generators; flexible piezo-micro-generator with various
widths; and PVDF electrospunpiezo-energy with interdigital
electrode.

Focusing on the latest developments of self-powered
microgenerators such as micro rotary with LTCC and filament winding
method, flexible substrate, and piezo fiber-typed microgenerator
with sound organization, the fabrication processes involved in MEMS
and nanotechnology are introduced chapter by chapter. In addition,
analytical solutions are developed for each generator to help the
reader to understand the fundamentals of physical phenomena. Fully
illustrated throughout and of a high technical specification, it is
written in an accessible style to provide an essential reference
for industry and academic researchers.

* Comprehensive treatment of the newer harvesting devices
including vibration-induced and rotary electromagnetic
microgenerators, polyvinylidene fluoride (PVDF)
nanoscale/microscale fiber, and piezo-micro-generators

* Presents innovative technologies including LTCC (low
temperature co-fire ceramic) processes, and PCB (printed circuit
board) processes

* Offers interdisciplinary interest in MEMS/NEMS technologies,
green energy applications, bio-related sensors, actuators and
generators

* Presented in a readable style describing the fundamentals,
applications and explanations of micro-harvesters, with full
illustration

C. T. Pan National Sun Yat-Sen University, Taiwan

Y. M. Hwang National Sun Yat-Sen University, Taiwan

Liwei Lin University of California, Berkeley, USA

Ying-Chung Chen National Sun Yat-Sen University, Taiwan

Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systems

Design and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design, analysis and fabrication of micro power systems. Presented in four distinct parts, the authors explore the design and fabrication of: vibration-induced electromagnetic micro-generators; rotary electromagnetic micro-generators; flexible piezo-micro-generator with various widths; and PVDF electrospunpiezo-energy with interdigital electrode.

Focusing on the latest developments of self-powered microgenerators such as micro rotary with LTCC and filament winding method, flexible substrate, and piezo fiber-typed microgenerator with sound organization, the fabrication processes involved in MEMS and nanotechnology are introduced chapter by chapter. In addition, analytical solutions are developed for each generator to help the reader to understand the fundamentals of physical phenomena. Fully illustrated throughout and of a high technical specification, it is written in an accessible style to provide an essential reference for industry and academic researchers.

• Comprehensive treatment of the newer harvesting devices including vibration-induced and rotary electromagnetic microgenerators, polyvinylidene fluoride (PVDF) nanoscale/microscale fiber, and piezo-micro-generators
• Presents innovative technologies including LTCC (low temperature co-fire ceramic) processes, and PCB (printed circuit board) processes
• Offers interdisciplinary interest in MEMS/NEMS technologies, green energy applications, bio-related sensors, actuators and generators
• Presented in a readable style describing the fundamentals, applications and explanations of micro-harvesters, with full illustration

Preface xiii

Acknowledgments xv

1 Introduction 1

1.1 Background 1

1.2 Energy Harvesters 2

1.2.1 Piezoelectric ZnO Energy Harvester 3

1.2.2 Vibrational Electromagnetic Generators 3

1.2.3 Rotary Electromagnetic Generators 4

1.2.4 NFES Piezoelectric PVDF Energy Harvester 4

1.3 Overview 5

2 Design and Fabrication of Flexible Piezoelectric Generators Based on ZnO Thin Films 7

2.1 Introduction 7

2.2 Characterization and Theoretical Analysis of Flexible ZnO-Based Piezoelectric Harvesters 10

2.2.1 Vibration Energy Conversion Model of Film-Based Flexible Piezoelectric Energy Harvester 10

2.2.2 Piezoelectricity and Polarity Test of Piezoelectric ZnO Thin Film 12

2.2.3 Optimal Thickness of PET Substrate 15

2.2.4 Model Solution of Cantilever Plate Equation 15

2.2.5 Vibration-Induced Electric Potential and Electric Power 18

2.2.6 Static Analysis to Calculate the Optimal Thickness of the PET Substrate 19

2.2.7 Model Analysis and Harmonic Analysis 21

2.2.8 Results of Model Analysis and Harmonic Analysis 23

2.3 The Fabrication of Flexible Piezoelectric ZnO Harvesters on PET Substrates 27

2.3.1 Bonding Process to Fabricate UV-Curable Resin Lump Structures on PET Substrates 27

2.3.2 Near-Field Electro-Spinning with Stereolithography Technique to Directly Write 3D UV-Curable Resin Patterns on PET Substrates 29

2.3.3 Sputtering of Al and ITO Conductive Thin Films on PET Substrates 29

2.3.4 Deposition of Piezoelectric ZnO Thin Films by Using RF Magnetron Sputtering 31

2.3.5 Testing a Single Energy Harvester under Resonant and Non-Resonant Conditions 34

2.3.6 Application of ZnO/PET-Based Generator to Flash Signal LED Module 39

2.3.7 Design and Performance of a Broad Bandwidth Energy Harvesting System 40

2.4 Fabrication and Performance of Flexible ZnO/SUS304-Based Piezoelectric Generators 48

2.4.1 Deposition of Piezoelectric ZnO Thin Films on Stainless Steel Substrates 48

2.4.2 Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 50

2.4.3 Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 51

2.4.4 Characterization of ZnO/SUS304-Based Flexible Piezoelectric Generators 52

2.4.5 Structural and Morphological Properties of Piezoelectric ZnO Thin Films on Stainless Steel Substrates 54

2.4.6 Analysis of Adhesion of ZnO Thin Films on Stainless Steel Substrates 56

2.4.7 Electrical Properties of Single-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator 59

2.4.8 Characterization of Double-Sided ZnO/SUS304-Based Flexible Piezoelectric Generator: Analysis and Modification of Back Surface of SUS304 61

2.4.9 Electrical Properties of Double-Sided ZnO/SUS304-Based Piezoelectric Generator 63

2.5 Summary 66

References 67

3 Design and Fabrication of Vibration-Induced Electromagnetic Microgenerators 71

3.1 Introduction 71

3.2 Comparisons between MCTG and SMTG 74

3.2.1 Magnetic Core-Type Generator (MCTG) 74

3.2.2 Sided Magnet-Type Generator (SMTG) 76

3.3 Analysis of Electromagnetic Vibration-Induced Microgenerators 76

3.3.1 Design of Electromagnetic Vibration-Induced Microgenerators 77

3.3.2 Analysis Mode of the Microvibration Structure 78

3.3.3 Analysis Mode of Magnetic Field 81

3.3.4 Evaluation of Various Parameters of Power Output 84

3.4 Analytical Results and Discussion 88

3.4.1 Analysis of Bending St…