The aim of this book is to present in one volume some of the most significant developments that have taken place in the field of integrated ferroelectrics during the last decade of the twentieth century. The book begins with a comprehensive introduction to integrated ferroelectrics and follows with fifty-three papers selected by Carlos Paz de Arauj

Carlos Pazde-Araujo, Ramamoorthy Ramesh, George W Taylor

1. Processing and Parameters of Sol-Gel PZT Thin-Films for GaAs Memory Applications 2. Pulsed Laser Deposition of Oriented PbZr.^O54Ti.^O46O^O3 3. Processing-Structure Relations for Ferroelectric Thin Films Deposited by Ion Beam Sputter Deposition 4. Recent Results on Switching, Fatigue and Electrical Characterization of Sol-Gel Based PZT Capacitors 5. Microscopic Modeling of Thin-Film Ferroelectrics: Fatigue 6. A Circuit Model for a Thin Film Ferroelectric Memory Device 7. Radiation Damage in Ferroelectric Thin-Film Memories 8. Integrated Ferroelectrics 9. Ferroelectric PbZr^O0.2Ti^O0.8O^O3 Thin Films on Expitaxial Y-Ba-Cu-0 10. Statistical Theory of Fatigue in Ferroelectric Devices 11. Sol-Gel Derived Ferroelectric THin Films in Silicon Micromachining 12. Theory of Conduction and Breakdown in Perovskite THin Films 13. Numerical Analysis of Ferroelctric Characteristics for Memory Use by Using a Lattice Model 14. Anomalous Remanent Polarization in Ferroelectric Capacitors 15. Chemical Aspects of Pb-Zr-Ti Oxide Thin Film Syntheses by PE-MOCVD below 500^ToC 16. Expitaxial La^O0.5Sr^O0.5CoO^O3 Electrode Films for Ferroelctric Device Applications 17. Conducting Oxide Electrodes for Ferroelectric Films 18. Deposition of Ba^O1-xSr^OxTiO3 via Liquid Source CVD (LSCVD) for ULSi DRAMs 19. A Theory of Polarization Reversals in Finite Systems 20. Electrochemical Models of Failure in Oxide Perovskites 21. Defect Chemistry and Transport Properties of Pb)Zr^O1/2Ti^O1/2)O^O3 22. Large-Area Growth of Pb (Zr, Ti)O^O3 Thin Films by MOCVD 23. Plasma Etching of PLZT: Review and Future Prospects 24. Ferroelectric La-Sr-Co-O/Pb-LA-Zr-Ti-O?La-Sr-Co-O Heterostructures on Silicon 25. Fatigue and Retention of Pb(Zr^O0.53Ti^O0.47)O^O3 Thin Film Capacitors with Pt and RuO^O2 Electrodes 26. 256Kb Ferroelectric Nonvolatile Memory Technology for 1T/1C Cell with 100ns Read/Write Time at 3V 27. Study on Ferroelectric Thin Films for Application to NDRO Non-Volatile Memories 28. Integrated Ferroelect