Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

John A. Pelesko, David H. Bernstein

Introduction. A Refresher on Continuum Mechanics. Small is Different. Thermally Driven Systems. Elastic Structures. Thermal-Elastic Systems. Electrostatic-Elastic Systems. Magnetic Actuation. Microfluidics. Beyond Continuum Theory. Appendices.