A practical "how to" guide that effectively deals with the
control of both contamination and ESD

This book offers effective strategies and techniques for
contamination and electrostatic discharge (ESD) control that can be
implemented in a wide range of high-technology industries,
including semiconductor, disk drive, aerospace, pharmaceutical,
medical device, automobile, and food production manufacturing. The
authors set forth a new and innovative methodology that can manage
both contamination and ESD, often considered to be mutually
exclusive challenges requiring distinct strategies.

Beginning with two general chapters on the fundamentals of
contamination and ESD control, the book presents a logical
progression of topics that collectively build the necessary skills
and knowledge:

* Analysis methods for solving contamination and ESD
problems

* Building the contamination and ESD control environment,
including design and construction of cleanrooms and ESD protected
environments

* Cleaning processes and the equipment needed to support these
processes

* Tooling design and certification

* Continuous monitoring

* Consumable supplies and packaging materials

* Controlling contamination and ESD originating from people

* Management of cleanrooms and ESD protected workplace
environments

Contamination and ESD Control in High-Technology
Manufacturing conveys a practical, working knowledge of
contamination and ESD control strategies and techniques, and it is
filled with case studies that illustrate key principles and the
benefits of contamination and ESD control. Moreover, its
straightforward style makes the material, which integrates many
disciplines of engineering and science, clear and accessible.

Written by three leading industry experts, this book is an
essential guide for engineers and designers across the many
industries where contamination and ESD control is a concern.

R. NAGARAJAN, PhD, is Professor in the Department of Chemical Engineering at the Indian Institute of Technology, Madras. He has fifteen years' R&D experience in contamination control and chemical integration with IBM's Storage Systems Division inSan Jose, California.

CARL E. NEWBERG is President and Director of Laboratory Operations for River's Edge Technical Service/MicroStat Laboratories.

This book offers effective strategies and techniques for contamination and electrostatic discharge (ESD) control that can be implemented in a wide range of high-technology industries, including semiconductor, disk drive, aerospace, pharmaceutical, medical device, automobile, and food production manufacturing. The authors set forth a new and innovative methodology that can manage both contamination and ESD, often considered to be mutually exclusive challenges requiring distinct strategies.

Beginning with two general chapters on the fundamentals of contamination and ESD control, the book presents a logical progression of topics that collectively build the necessary skills and knowledge:

• Analysis methods for solving contamination and ESD problems
• Building the contamination and ESD control environment, including design and construction of cleanrooms and ESD protected environments
• Cleaning processes and the equipment needed to support these processes
• Tooling design and certification
• Continuous monitoring
• Consumable supplies and packaging materials
• Controlling contamination and ESD originating from people
• Management of cleanrooms and ESD protected workplace environments

Contamination and ESD Control in High-Technology Manufacturing conveys a practical, working knowledge of contamination and ESD control strategies and techniques, and it is filled with case studies that illustrate key principles and the benefits of contamination and ESD control. Moreover, its straightforward style makes the material, which integrates many disciplines of engineering and science, clear and accessible.

Written by three leading industry experts, this book is an essential guide for engineers and designers across the many industries where contamination and ESD control is a concern.

Preface xv

1 Fundamentals of Contamination Control 1

1.1 Introduction 1

1.1.1 Contamination Sources 1

1.1.2 Contamination Adhesion Forces 3

1.1.3 Contamination Control Methods 9

1.2 Glossary of Contamination Control Terms 10

1.3 Specifying Contamination in Air and on Surfaces 13

1.4 Sources of Contamination 16

1.5 Contamination Control Requirements 18

1.5.1 Airborne Particle Requirements 18

1.5.2 Chemical Vapor Contamination Control Limits 33

1.5.3 Ionic Contamination Control Limits 35

1.5.4 Magnetic Contamination Control Limits 37

1.5.5 Surface Contamination Rates and Air Ionization 37

1.5.6 Contact Transfer and In Situ Contamination 38

1.5.7 Airflow Requirements 39

1.5.8 Pressure Requirements and Enclosure Exhausts 39

1.5.9 Maintenance Requirements 40

1.5.10 Other Requirements 43

1.5.11 Summary of Requirements 43

1.6 Pertinent Standards 43

References and Notes 46

Additional Reading 46

2 Fundamentals of ESD Control 48

2.1 Introduction and Historical Perspective 48

2.2 Glossary of Electrostatic Charge Control Terms 52

2.3 Sources of Electrostatic Charge 56

2.3.1 Static Electricity 57

2.3.2 Effects of Electrostatic Charge and Discharge 65

2.3.3 Failure Modes in High-Technology ESD-SensitivityDevices 67

2.4 Requirements of ESD Control 68

2.4.1 Determining ESD Damage Sensitivity 69

2.4.2 Electrically Explosive Device ESD Modeling 74

2.5 Building the ESD-Safe Workplace 75

2.5.1 Surface Resistivity of Materials 75

2.5.2 Grounding 77

2.5.3 Identification of and Access to an ESD-Safe Work Area 78

2.5.4 ESD-Protective Floor Coverings 78

2.5.5 Work Surfaces and Table Mats 81

2.5.6 Wrist Strap Ground Points 83

2.5.7 Air Ionization Systems 83

2.5.8 Relative Humidity 88

2.5.9 Chairs and Stools 90

2.5.10 Trash Cans 90

2.5.11 Cathode-Ray Tube Displays 91

2.5.12 Field Potential Limits 93

2.5.13 Tools and Fixtures 94

2.5.14 Conveyors 94

2.6 ESD Controls for People 95

2.6.1 Wrist Strap and Coiled Cord 95

2.6.2 Training and Certification Program 95

2.6.3 Cleanroom Gowns and ESD Lab Coats 97

2.6.4 Footwear 98

2.6.5 Gloves, Liners, and Finger Cots 100

2.7 Consumables and Accessories 100

2.7.1 Packaging 100

2.7.2 Desiccants 102

2.7.3 Tote Boxes, Bins, and Other Shipping Containers 102

2.7.4 Notebooks and Sheet Protectors 104

2.7.5 Swabs and Wipers 104

2.7.6 Paper 104

2.7.7 Tape 104

2.8 Personnel Equipment and Procedures for Its Use 105

2.8.1 Wrist Straps and Wrist Strap Monitors 105

2.8.2 SitStand Protocol 106

2.9 Transportation of ESD-Sensitive Products 106

2.10 Inspections and Record Keeping 106

2.10.1 Daily Visual Inspec…