Wafer Level 3-D ICs Process Technology Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif E-Book (pdf)

Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses Christopher Lyle Borst, William N. Gill, Ronald J. Gutmann E-Book (pdf)

Chemical Mechanical Planarization of Microelectronic Materials Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann E-Book (pdf)