A complete all-in-one reference to aspheric fabrication
and testing for optical applications

This book provides a detailed introduction to the manufacturing
and measurement technologies in aspheric fabrication. For each
technology, both basic theory and practical applications are
introduced.

The book consists of two parts. In the first part, the basic
principles of manufacturing technology for aspheric surfaces and
key theory for deterministic subaperture polishing of aspheric
surfaces are discussed. Then key techniques for high precision
figuring such as CCOS with small polishing pad, IBF and MRF, are
introduced, including the basic principles, theories and
applications, mathematical modeling methods, machine design and
process parameter selection. It also includes engineering
practices and experimental results, based on the three kinds of
polishing tools (CCOS, IBF and MRF) developed by the author's
research team.

In the second part, basic principles of measurement and some
typical examples for large and middle-scale aspheric surfaces are
discussed. Then, according to the demands of low cost, high
accuracy and in-situ measurement methods in the manufacturing
process, three kinds of technologies are introduced, such as the
Cartesian and swing-arm polar coordinate profilometer, the
sub-aperture stitching interferometer and the phase retrieval
method based on diffraction principle. Some key techniques are also
discussed, including the basic principles, mathematical modeling
methods, machine design and process parameter selection, as well as
engineering practices and experimental results. Finally, the
team's research results about subsurface quality measurement
and guarantee methods are also described.

This book can be used as a reference for scientists and
technologists working in optical manufacturing, ultra-precision
machining, precision instruments and measurement, and other
precision engineering fields.

* A complete all-in-one reference to aspheric fabrication and
testing for optical applications

* Presents the latest research findings from the author's
internationally recognized leading team who are at the cutting edge
of the technology

* Brings together surface processing and measurement in one
complete volume, discussing problems and solutions

* Guides the reader from an introductory overview through to more
advanced and sophisticated techniques of metrology and
manufacturing, suitable for the student and the industry
professional

Professor Shengyi Li, College of Mechatronics and Automation, National University of Defense Technology, Hunan, China. Prior to moving to the NUDT, Professor Li was a Visiting Scholar at Rensselaer Polytechnic Institute, and Columbia University, both USA. He has contributed to over 200 publications, including 130 refereed journal articles, 6 edited books (all in Chinese) and 11 invited reports. Professor Li's current research interests include ultra-precision machining technology, magnetorheological finishing, ion beam figuring, measurement and control of precision mechatronic system, and theory and technology of modern optical testing.

Yifan Dai, Director, Department of Mechatronic Engineering, College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha, China.

Zusammenfassung

A complete all-in-one reference to aspheric fabrication and testing for optical applications

This book provides a detailed introduction to the manufacturing and measurement technologies in aspheric fabrication. For each technology, both basic theory and practical applications are introduced.

The book consists of two parts. In the first part, the basic principles of manufacturing technology for aspheric surfaces and key theory for deterministic subaperture polishing of aspheric surfaces are discussed. Then key techniques for high precision figuring such as CCOS with small polishing pad, IBF and MRF, are introduced, including the basic principles, theories and applications, mathematical modeling methods, machine design and process parameter selection. It also includes engineering practices and experimental results, based on the three kinds of polishing tools (CCOS, IBF and MRF) developed by the author's research team.

In the second part, basic principles of measurement and some typical examples for large and middle-scale aspheric surfaces are discussed. Then, according to the demands of low cost, high accuracy and in-situ measurement methods in the manufacturing process, three kinds of technologies are introduced, such as the Cartesian and swing-arm polar coordinate profilometer, the sub-aperture stitching interferometer and the phase retrieval method based on diffraction principle. Some key techniques are also discussed, including the basic principles, mathematical modeling methods, machine design and process parameter selection, as well as engineering practices and experimental results. Finally, the team's research results about subsurface quality measurement and guarantee methods are also described.

This book can be used as a reference for scientists and technologists working in optical manufacturing, ultra-precision machining, precision instruments and measurement, and other precision engineering fields.

• A complete all-in-one reference to aspheric fabrication and testing for optical applications
• Presents the latest research findings from the author's internationally recognized leading team who are at the cutting edge of the technology
• Brings together surface processing and measurement in one complete volume, discussing problems and solutions
• Guides the reader from an introductory overview through to more advanced and sophisticated techniques of metrology and manufacturing, suitable for the student and the industry professional

About the Author xiii

Foreword xv

Preface xvii

1 Foundation of the Aspheric Optical Polishing Technology 1

1.1 Advantages and Application of Aspheric Optics 1

1.1.1 Advantages of Optical Aspherics 1

1.1.2 The Application of Aspheric Optical Components in Military Equipment 2

1.1.3 The Aspheric Optical Components in the Civilian Equipment 2

1.2 The Characteristics of Manufacturing Aspheric Mirror 3

1.2.1 Requirements of Modern Optical System on Manufacturing Aspheric Parts 3

1.2.2 The Processing Analysis of Aspheric Optical Parts 7

1.3 The Manufacturing Technology for Ultra-Smooth Surface 9

1.3.1 Super-Smooth Surface and Its Applications 9

1.3.2 Manufacturing Technology Overview of Super-Smooth Surface 11

1.3.3 Manufacturing Technology of Ultra-Smooth Surface Based on the Mechanical Micro-Cutting Principles 12

1.3.4 The Traditional Abrasive Polishing Technology for Ultra-Smooth Surface 13

1.3.5 The Principles and Methods of Non-contact Ultra-Smooth Polishing 15

1.3.6 The Non-contact Chemical Mechanical Polishing (CMP) 17

1.3.7 The Magnetic Field Effect Auxiliary Processing Technology 17

1.3.8 The Particle Flowing Machining Technology 18

1.4 The Advanced Aspheric Optical Polishing Technology 19

1.4.1 The Classic Polishing for Aspheric Optical Parts 19

1.4.2 The Modern CNC Polishing Method of Aspheric Optical Parts 20

1.4.3 The Controllable Compliant Tool (CTT) Manufacturing Technology for Aspheric Optical Components 22

1.5 The CCT Based on Elasticity Theory 28

1.5.1 The Controlled Elastic Deformation Pad PolishingStressed-Lap Polishing (SLP) 29

1.5.2 The Controlled Mirror Body Elastic Deformation Polishing by…